Atomic Layer Deposition on 2D Materials
2017-06-11
org.kosen.entty.User@23965b46
박영환(yehapark)
분야
재료
개최일
(Web): April 25, 2017
신청자
박영환(yehapark)
개최장소
URL
행사&학회소개
1. INTRODUCTION
2. ALD ON GRAPHITE
3. ALD GROWTH ON GRAPHENE
4. ALD GROWTH ON TMDS
5. ALD GROWTH ON OTHER 2D MATERIALS
6. SUMMARY AND OUTLOOK
2. ALD ON GRAPHITE
3. ALD GROWTH ON GRAPHENE
4. ALD GROWTH ON TMDS
5. ALD GROWTH ON OTHER 2D MATERIALS
6. SUMMARY AND OUTLOOK
보고서작성신청
통상 전자소재는 2차원 구조물을 적층한 구조로 하여 매우 집적된 회로 성능을 구현한다. 집적도의 향상이 계속 요구됨에 따라 소재의 정밀한 구조고 필요로 한다. ALD 기술을 이용하여 원소 두께를 정밀하게 조절하는 기술은 이러한 시대적 요구를 만족시키는 중요한 기법이다.
2D materials are layered crystalline materials and are the most attractive nanomaterials due to their potentials in next-generation electronics. Because most 2D materials are atomically thin, a suitable fabrication process without degradation of the original properties of the material is required to realize 2D-material-based devices. Atomic layer deposition (ALD) is an ideal technique for adding materials with atomic scaling precision to nanomaterials. Due to the surface-sensitive reactions of ALD, growth on 2D materials is strongly affected by the surface properties of the 2D materials. In this Perspective, ALD growth on 2D materials is reviewed and discussed with previously reported results to provide insights to readers who are investigating 2D materials and relevant topics.
2D materials are layered crystalline materials and are the most attractive nanomaterials due to their potentials in next-generation electronics. Because most 2D materials are atomically thin, a suitable fabrication process without degradation of the original properties of the material is required to realize 2D-material-based devices. Atomic layer deposition (ALD) is an ideal technique for adding materials with atomic scaling precision to nanomaterials. Due to the surface-sensitive reactions of ALD, growth on 2D materials is strongly affected by the surface properties of the 2D materials. In this Perspective, ALD growth on 2D materials is reviewed and discussed with previously reported results to provide insights to readers who are investigating 2D materials and relevant topics.