1998-12-17
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첨부파일
http://ilp.mit.edu/ilp/
MEMS:Research and Applications in Microelectremechanical Systems와 관련하여 여러 자료로 구성된다.
1. MEMS:Research and Applications in Microelectremechanical Systems
"Poster Session Guidebook"
2. MEMS:Research and Applications in Microelectremechanical Systems(98.3.31-4.1)
이 연구는 "The MIT INDUSTRIAL LIAISON PROGRAM"이 후원한다.
여기서
A.참가원 리스트
B.AGENDA
C.Speaker Information
(Alan H. Epstein/ Dennis M.Freeman/ Klaus F. Jenson/ Albert P.Pisano/ Martin Schmidt/ Stephen D. Senturia/ Charles G. Sodini)
3. MEMS:Research and Applications in Microelectremechanical Systems
"A Survey of Research Done at MIT in the area of Microelectricalmechanical Systems "
여기와 관련하여 더 많은 정보를 알고 싶다면,
http://ilp.mit.edu/
This report contains brief descriptions of research done at MIT in the area of Microelectromechanical systems, or MEMS.
MEMS technology, in the mest simple terms, is using semiconductor or photolithorgaphic-based manufacturing techniques to create analog devices.
The interconnection of components gives it flexibility in solving problems. MEMS is important to the future of the microfabrication of sensors, actuators and computers.
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