2007-02-12
org.kosen.entty.User@44370e28
손삼익(samicks)
- 1
Cu metallization에 대한 자료를 구합니다.
diffusion barrier에 대한 자료 부탁 드립니다.
- cu
- metallization
- barrier
지식의 출발은 질문, 모든 지식의 완성은 답변!
각 분야 한인연구자와 현업 전문가분들의 답변을 기다립니다.
각 분야 한인연구자와 현업 전문가분들의 답변을 기다립니다.
답변 1
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답변
이영국님의 답변
2007-02-13- 0
첨부파일
- 1). 0213051751Barrier layer effects on reliabilities of copper metallization.pdf (0 KB)
- 2). 0213051751Chemical vapor deposition of copper film from hexafluoroacetyl-acetonateCu(I)vinylcyclohexane.pdf (0 KB)
- 3). 0213051751Copper metallization based on direct-liquid-injection hot-wire CVD.pdf (0 KB)
- 4). 0213051751Chemical vapor deposition of copper film from hexafluoroacetyl-acetonateCu(I)vinylcyclohexane.pdf (0 KB)
- 5). 0213051751Copper metallization based on direct-liquid-injection hot-wire CVD.pdf (0 KB)
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1). 0213051751Barrier layer effects on reliabilities of copper metallization.pdf
(0 KB)
-
2). 0213051751Chemical vapor deposition of copper film from hexafluoroacetyl-acetonateCu(I)vinylcyclohexane.pdf
(0 KB)
-
3). 0213051751Copper metallization based on direct-liquid-injection hot-wire CVD.pdf
(0 KB)
-
4). 0213051751Chemical vapor deposition of copper film from hexafluoroacetyl-acetonateCu(I)vinylcyclohexane.pdf
(0 KB)
- 5). 0213051751Copper metallization based on direct-liquid-injection hot-wire CVD.pdf (0 KB)
Cu metallization과 diffusion barrier에 대한 논문입니다.