2006-06-09
org.kosen.entty.User@4452e007
최창선(lovenlike)
Current research activities focus on 1) synthesis and characterization of nanostructures of compound semiconductors such as ZnO, GaN and CN, 2) development of new hardmask materials for nanopatterning, 3) device applications of low-dimensional semiconductors, and 4) high power light-emitting diodes (LEDs). In our laboratory we have good facilities such as ICP etcher, PECVD, ALD, RTCVD and IACVD as well as analysis instruments and simulation licenses (CFD-ACE+) which are utilized to analyze, simulate and optimize the advanced materials processing.
