Nanoimprint lithography is an emerging technology for the fabrication of patterns at sub-100 nm resolution. Compared with other lithography tools based on optics, it generates nano-scale patterns with ease at low cost. The equipment itself is much cheaper than EUV, X-ray lithography tools.
The following schematic diagram shows the procedure how to make metal nanowires by nanoimrpint lithography. It looks simple however, there is a complex of science and engineering inside.
