The objective of the research is to exploit the newly emerging field of ultrafast optics so as to establish ultra-precision technologies that will enable nano-fabrication and metrology over extensive ranges as demanded in the next generation of precision engineering. To the end, a systematic approach will be pursued to generate noble coherent light sources covering the whole optical spectrum spanning from the THz wave to the EUV by making the most of femtosecond laser pulses. The study aiming to investigate ultrafast optics for improving the level of ultraprecision comprises a series of research subjects that are categorized into five groups as follows:
- Developments of new ultrafast optical sources
- Ultra-Precision dimensional metrology
- Ultrafast plasmonics and coherent EUV generation
- Ultrafast photonics for space
- Ultrafast photonics for nano-manufacturing
These itemized R and D subjects are investigated individually in parallel with each other, with focus on creating their possible contributions for the advance of fundamental ultra-precision science and technology. And, at the same time, the achieved results of the subject will be synthesized and combined together to demonstrate their usefulness as basic core technologies enabling a wealth of industrial applications of ultra-precision.