We aim to develop several fabrication methods for multiscale, hierarchical, high aspect ratio structures with potential applications to nature-inspired functional surfaces including lotus leaf and gecko foot hairs. In addition to traditional optical lithography, we are currently developing various unconventional lithographic methods such as nanoimprint lithography, capillary force lithography, and adhesive force lithography. Each patterning method can be assisted with additional thermal or UV light for enabling complicated micro/nanoscale combined structures. For lotus leaf, we are focused on manufacturing hierarchical structures with a material of low surface energy (e.g., UV-curable Teflon-like polymer, diamond-like carbon) along with detailed analysis of various wetting states. For gecko foot hairs, we are developing two-step molding approach mediated by partial curing of the UV-curable resin, which allows for the fabrication of multiscale gecko seta that are really similar to those of real gecko. In addition, functional materials such as nano-Velcro and low-friction surfaces are currently under investigation.