MINT laboratory has lots of interest on the researches related to Integrated MEMS (Micro Electro Mechanical Systems) technology. Currently, MINT laboratory endeavored to bear fruitful results on the various research areas. Those activities include a research of biomedical sensors which can be implanted, a research of RF wireless modules of the next generation, and some efforts to integrate electro - chemical laboratory on a single chip. The ultimate vision of these kinds of researches is to build a micro system that will combine natural signals (such as bio-electrical, optical, thermal, chemical signals) as well as electrical signals on a single chip by new 3-D structures integrated and realized by MEMS technology with low-power