The laboratory and its associated Center for Microelectronic Sensors and MEMS is equipped with facilities to research on the design, fabrication, and characterization of miniaturized micromachines implemented on chips with integrated circuits for microelectromechanical systems (MEMS). In addition to complete semiconductor clean-room processing facilities, a pattern generator, a double-side mask aligner, anisotropic etching systems, wafer polishers, electroplating systems, wafer bonding and packaging facilities for surface, bulk, and semi-LIGA micromaching processes are available. The laboratory has SUN SPARC stations to run ANSYS software for mechanical, electrical or magnetic field, and thermal analysis of microstructures.
국가
미국
소속기관
신시네티 대학교 (학교)
연락처
-556-4767 http://secs.ceas.uc.edu / ~ ahnch
책임자
안종혁 ahnch@ucmail.uc.edu