Research Objective
Advancing ultra-precision light source technology from IR to EUV regime using femtosecond pulse lasers, and interdisciplinary applications including high-precision optical metrology, nano/micro material processing/synthesis, precision spectroscopy, time/frequency standards, and future space missions.
The objective of our research is to exploit the newly emerging field of ultrafast optics so as to establish ultra-precision technologies that will enable nano-fabrication and metrology over extensive ranges as demanded in the next generation of precision engineering. To the end, a systematic approach will be pursued to generate noble coherent light sources covering the whole optical spectrum spanning from the THz wave to the EUV by making the most of femtosecond laser pulses. The study aiming to investigate ultrafast optics for improving the level of ultraprecision comprises a series of research subjects that are categorized into five groups as follows:
- Developments of new ultrafast light sources
- Ultra-precision dimensional metrology
- Ultrafast photonics for nano & micro manufacturing
- Ultrafast photonics for next-generation space missions
- Ultrafast plasmonics and coherent EUV generation
These itemized R&D subjects are investigated individually in parallel with each other, with focus on creating their possible contributions for the advance of fundamental ultra-precision science and technology. And, at the same time, the achieved results of the subject will be synthesized and combined together to demonstrate their usefulness as basic core technologies enabling a wealth of industrial applications of ultra-precision.
Detailed Research Subjects
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- Development and stabilization of ultrafast light sources
- High-precision surface metrology using femtosecond light pulses
- High-precision time-of-flight (TOF) measurement using ultrafast light pulses
- Precision spectroscopic LIDAR using two femtosecond lasers
- Real-time absolute distance measurement by multiple wavelength referenced to the frequency comb
- Direct laser writing (DLW) of graphene electronics using ultrafast laser pulses
- Synthesis of laser induced graphene (LIG) on top of various substrates
- High-power Yb-fiber femtosecond laser for non-thermal material processing
- Long-term stable coherent EUV generation using high-power fiber femtosecond laser
- Coherent, efficient and compact EUV generation by plamonic field enhancement at metallic nano structures