What is MEMS ?
MEMS is an acronym of Micro-Electro-Mechanical Systems.
Integrated Circuits (IC) based on semiconductor technology have been advanced to include the actuating parts of driving forces, those are the mechanical components.
MEMS is the new generation of the semiconductor microfabrication technology for system chips, so called MEMS technology.
MEMS/NEMS research fields:
Micro/Nano-tribology, Micro/Nano-machining, Micro/Nano-fluidics,
Micro/Nano-cryogenics, CMOS-MEMS/NEMS, Optical-MEMS/NEMS,
Micro/nano-robot, RF-MEMS/NEMS, Bio-MEMS/NEMS,
Micro/Nano-acoustics
MEMS/NEMS Applications:
Ink-jet printer(bubble jet or Piezo jet)
Micro-phone
Micro-antenna
Lab-on-a chip(insulin checker)
Micro-gyroscope
Accelerometer
국가
대한민국
소속기관
전북대학교 (학교)
연락처
063-270-2317 http://home.jbnu.ac.kr/mems/index.htm
책임자
김근주 kimk1239@gmail.com