연구분야 세부설명 |
microsystem, sensors & actuators, RF MEMS, Optical MEMS, Inertial Measurement Unit (IMU), micro fabrication, packaging & reliability |
연구분야 세부설명 |
microsystem, sensors & actuators, RF MEMS, Optical MEMS, Inertial Measurement Unit (IMU), micro fabrication, packaging & reliability |