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동향

동향

EUV Photoelectron Spectroscopy

2004-01-23 org.kosen.entty.User@3bac9f3f 김상훈(navkim)

분야

전기/전자

발행기관

Toshihisa TOMIE

발행일

200310

첨부파일

Development of a Sub-Micron Resolution EUPS (EUV Photoelectron Spectroscopy) System Photoelectron spectrum (PS) has been obtained from a sample irradiated with a sub-micron EUV beam. In EUPS devised at AIST, a sample is irradiated by a narrow line-emission from a laser-plasma source and the energy of emitted photoelectrons is analyzed by Time-Of-Flight. High efficiencies in the use of a photon source and electron energy analysis enables us to acquire high-spatial-resolution PS. As seen in the Figure, the energy resolution of EUPS is high enough. By forming a micro beam with a multilayer coated Schwarzschild optics, we can achieve sub-micron spatial resolution. By collecting photoelectrons with high efficiency by employing a magnetic bottle, we succeeded in obtaining a decent PS.
김상훈

김상훈(navkim)

AdvancedRes
LG

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